Available technologies

Nanolithography, Plasma etching, Thin film technology, characterization and metrology

ThunderNIL masters and combines in clever nanofabrication schemes a broad set of technologies

  • Pulsed-NIL
  • Nanoimprint Lithography
  • Electron Beam Lithography
  • High resolution X-ray lithography
  • LIGA
  • Interference Lithography
  • Soft Lithography – Microcontact printing
  • UV Photolithography
  • Interference lithography

  • Sputtering
  • Physical Vapor Deposition
  • Electroplating
  • Spin-coating

  • Plasma etching with RIE and ICP systems
  • Wet etching
  • Scanning Electron Microscopy
  • Elemental analysis (EDX)
  • Contact angle measurement
  • I-V Measurements